基于静压气浮导轨的直线电机高性能工作台的研制

Development of High-performance Linear Motor Stage Based on Static-pressure Air-bearing Slider

精密定位技术是精密工程领域的关键技术,由直线电机驱动的气浮直线导轨工作台在超精密运动领域得到广泛应用。本文介绍了静压气浮导轨的设计方法,开发了止推气浮轴承设计软件;为了提高气浮导轨的承载能力和刚度,总结提出了几种适用于不同结构气浮导轨的预加载技术;运用气浮轴承设计系统和适合的预加载技术,研制了能满足大惯量、高速度、高精度要求的H型直线电机气浮工作台。

Precision positioning is a key technology in precision engineering. Air-bearing slider stages driven by linear motors are widely applied in ultra-precision engineering. The design methods of staticpressure air-bearing sliders were presented and an air-beating design system was developed. Furthermore several of their preload techniques were proposed to improve their load capability and stiffness. A new Htype linear motor-driven and air-bearing stage was developed by using the air-bearing design system, which can meet huge inertia, high-speed and ultra-precision requirements.