TPMS硅基压阻式压力传感器的研制

Design and Fabrication of a Novel Silicon Piezoresistive Pressure Microsensor for TPMS

轮胎压力监测系统(TPMS)对压力传感器越来越大的市场需求使得这类传感器再次成为一个研究热点.商业领域对新一代压力传感器的要求是小尺寸、高性能、低价格,针对在30μm厚度的硅杯方形薄膜上采用新型折线形状和位置的压敏电阻,设计并制作了一系列压阻式压力传感器.分析和讨论了膜的面积、电阻形状和位置等参数对压力传感器的灵敏度和线性度的影响.测试得到1000kPa量程下边长为370μm的压力传感器灵敏度和线性度分别为15.5mV/V·FS、0.012%/FS;边长为470μm的传感器的灵敏度和线性度分别为32.2mV/V·FS、0.078%/FS,满足TPMS应用标准.这种器件体积小、成品率高,灵敏度和线性度均得到提高,也可用于医学、航空等其他领域.

With the huge market demand of TPMS （Tire Pressure Monitoring System） application, new tire pressure sensors with miniature size, high performance and low cost have been highly desired. Series of novel piezoresistive pressure microsensors have been designed, fabricated and tested, which use 30 μm thick silicon diaphragms with novel meander shape piezoresistors and placing style. Relationships between major performance parameters including the sensitivity and linearity and the diaphragm area, piezoresistor shape as well as placing method are analyzed systematically. The sensitivity and linearity of two kind 1000kPa full scale pressure microsensors （370μm×370μm and 470μm×470μm） are 15.5 mV/V·FS, 0.012%/FS, and 32.2 mV/V·FS, 0.078%/FS, respectively. These microsensors have small size, high yield, high sensitivity and high linearity, which can be used in TPMS, medicine, aerospace as well as many other applications.