基于强度解调的Fabry-Perot型光纤MEMS压力传感器

A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Intensity Demodulation Method Interferometry

运用微机械系统加工技术制作了一种新型法布里-珀罗干涉型光纤微机电系统压力传感器，该传感器通过测量反射光谱的移动测量压力．运用多腔干涉原理对该传感器进行理论以及模拟分析得出，通过改变压力传感器的尺寸可较容易的调节压力线性测量范围和灵敏度．实验结果表明，在压力线性测量范围[0．1～1．0]MPa内，灵敏度可达到12．71nm／MPa（光谱移动／压力）．

By employing the surface and bulk microelectromechanical system （MEMS） techniques, a simple and miniature optical Fabry-Perot interferometric pressure sensor are designed and demonstrated, where the loaded pressure is gauged by measuring the spectrum shift of the reflected optical signal. From the simulation results based on a multiple cavities interference model, the response range and sensitivity of this pressure sensor can be simply altered by adjusting the size of sensing area. The experimental results show that a high linear response in the range of 0.1～1.0 MPa and a reasonable sensitivity of 12.71 nm/MPa （spectrum shift/pressure） have been obtained in this sensor.