期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

电磁激励的硅谐振梁设计和有限元分析

Design and Finite Element Analysis of a Magnetically Actuated Silicon Resonant Beam
下载PDF
导出
摘要 介绍了电磁激励硅谐振梁的激励和检测原理,给出了双端固支的硅谐振梁谐振频率公式,并利用该公式分析了双端固支梁的谐振频率和梁尺寸的关系.本文利用有限元软件模态分析计算了三种不同的谐振频率情况,并逐一加以比较分析.本文还利用有限元软件对受力弯曲的工字梁做了静态分析,从而得出了在一定磁场力作用下的应力分布图,从而对压敏电阻的设计提供了一定的依据. The actuation and detection principle of a magnetically actuated silicon resonant beam is introduced. The resonant frequency of a clamped-clamped silicon resonant beam is presented. The relation between resonant frequency of the clamped-clamped beam and the beam＇s dimension. Three resonant frequencies using the Finite Element analysis are calculated, and compared with each other. A stress map of H bearing beam is obtained using the Finite Element analysis, which is valuable to the design of a piezoresistor.
作者 潘军 黄庆安 秦明
机构地区 东南大学MEMS教育部重点实验室
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期1835-1839,共5页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金资助(60476019)
关键词 谐振频率 电磁激励 双端固支梁 有限元 resonant frequency magnetic actuation clamped-clamped beam finite element analysis
分类号 TP212.1 [自动化与计算机技术—检测技术与自动化装置]
  • 相关文献

参考文献11

  • 1Enoksson P, Stemme G and Stemme E. A Silicon Resonant Sensor Structure for Coriolis Mass-Flow Measurements[J]. J.Microelectromech. Syst, 1997, 6(2): 119-125.
  • 2Enoksson P, Stemme G and Stemme E. Vibration Modes of a ResonantSilieon Tube Density Sensor[J]. J. Microelectromech.Syst, 1996, 5(1): 39-44.
  • 3Corman T, Noren K, Enoksson P, Melin J, and Stemme G."Burst" Technology with Feedback-Loop Control for Capacitive Detection and Electrostatic Excitation of Resonant Silicon Sensors[J]. IEEE Trans. Electron Devices, 2000, 47 (11) :2228-2235.
  • 4Mailly F, Dumas N, Latorre L, and Nouet P. Towards On-Line Testing of MEMS Using Electro-Thermal Excitation[C]//Proceedings of the European Test Symposium (ETS'05) 2005: 76-81.
  • 5Greenwood J C, Satchell D W. Miniature silicon resonant pressure sensor[J]. IEE Proceedings, Part D, 1988, 135(5) :369-372.
  • 6Stemme D, Stemme G. A Balanced Dual-Diaphragm Resonant Pressure Sensor in Silicon [J]. IEEE Trans. Electron Devices. 1990, 37(3): 648-652.
  • 7Esashi M, Sugiyama S, Ikeda K, Wang Y, Miyashita H.Vacuum-Sealed Silicon Micromachined Pressure Sensors[J].Proceedings of the IEEE, 1998, 86(8): 1627-1639.
  • 8Ono T, Esashi M, Magnetic Force and Optical Force Sensing with Ultrathin Silicon[J]. Resonator Review of Scientific Instruments. 2003, 74(12): 5141-5146.
  • 9Lange D, Hagleitner C, Herzog C, Brand O, and Baltes H.Magnetic Actuation and MOS-transistor Sensing for CMOS-integrated Resonators[C]//Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 2002, p 304-307.
  • 10钟莹,李醒飞,张国雄.有限元法在谐振式硅微机械加速度计设计中的应用[J].天津大学学报（自然科学与工程技术版）,2003,36(4):465-467. 被引量：3

二级参考文献15

  • 1Helsel M, Gassner G, Robinson Met al. A navigation grade micro-machined silicon accelerometer[ A]. Position Location and Navigation Symposium[ C]. New York:1994.
  • 2Trey A Roessig,Roger T Howe,Albert P Pisano et al. Sur-face-micromachined resonant accelerometer[ A]. Transducers 97 Chicago[ C]. Chicago :1997.
  • 3TILMANS H A C,ELWENSPPOEK M,FLUITMAN J H J.Micro resonant force gauges.[J] Sensors and Actuators A,1992,(30): 35-53.
  • 4WILFINGER R J,et al.The resonistor: a frequency selective device utilizing the mechanical resonance of a silicon substrate[J],IBM J.Res.& Dev.,1968,12: 113-118.
  • 5LAMMERINK T S J,ELWENSPOEK M,VANOUWERKERK R H,et al.Performance of thermally excited resonators.[J] Sensors and Actuators,1990,A21-A23: 352-356.
  • 6LAMMERINK T S J,ELWENSPOEK M,FLUITMAN J H J.Frequency dependence of thermal excitation of micromechanical resonators.Sensors and Actuators A,25-27 1991,685-689.
  • 7OTHMAN M B,BRUNNSCHWEILER A.Electrothermally excited silicon beam mechanical resonators [J] .Electronics Letters.2nd July,1987,23 (14): 728-730.
  • 8BRAND O,BALTES H,BALDENWEG U.Membrane resonators in bipolar and CMOS IC technology [C] .The 7th international conference on solid-state sensors and actuators,646-649.
  • 9BRAND O,BALTES H.Member,IEEE and Urs Baldenweg.Thermally excited silicon oxide beam and bridge resonators in CMOS technology [J] .IEEE transactions on electron devices,1993,40 (10): 1745-1753.
  • 10LEGTENBERG R,BOUWSTRA S,FLUITMAN J H J.Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer [J] .Sensor and Actuators A.25-27(1991) 723-727.

共引文献5

传感技术学报
2006年 第05B期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部