摘要
针对当前MEMS产业化推进过程中的小批量的发展现状,研究面向批量组装的MEMS微操作实用化系统具有重要实际价值.针对MEMS高温压力传感器产业化发展过程中的批量化键合工艺需求,从分析压力传感器键合工艺入手,研究批量组装关键技术,最后进行系统集成研制MEMS压力传感器批量组装设备.批量组装实验表明该系统可实现典型MEMS传感器批量组装,对MEMS产业化发展具有重要意义.
According to current state of industrialization for short runs MEMS, it has much important actual value that research on serial production system for MEMS batch assemblage. This paper, which aims at key patch bonding technique of MEMS high temperature pressure sensors, develops and integrates a batch assemble system for MEMS pressure sensors. Experiment results indicate that this system could achieve batch assembly for typical MEMS pressure sensors, and it is of far reaching importance for development of MEMS industrialization.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期1847-1851,共5页
Chinese Journal of Sensors and Actuators
基金
图家863计划项目资助(2005AA404230)
