一种硅微谐振式压力传感器的敏感膜片设计

A Diaphragm Design of Microfabircated Resonant Pressure Sensor

根据正方形膜片的变形和应力分布情况,提出了一种硅微谐振式压力传感器敏感膜片的设计方法,设计了两种正方形间接连接式压力敏感膜片.在相同的膜片面积下,新膜片与原有矩形间接连接式压力敏感膜片性能相近,为内部谐振器的多样化提供了基础.最后,就压力敏感膜片的工艺设计进行了探讨,认为采用正方形凸角补偿结构的〈110〉硅岛和采用边长补偿的〈100〉硅岛最适合间接连接式压力敏感膜片.

A design principle of the diaphragm for microfabricated resonant pressure sensor was present, based on the deformation and stress distribution of square diaphragm, two kinds of square diaphragm with silicon islands were developed as well. At the condition of the same area, the new diaphragms had a similar performance as the original rectangle diaphragm with silicon islands, which made it be possible to develop various resonators attached to the diaphragm. Finally, the microfabircation of the diaphragms was discussed, the 〈110〉 island with square convex corner compensation and the 〈100〉 island with length compensation were fitted for the diaphragm with silicon islands.