基于波长解调的Fabry-Perot型光纤MEMS压力传感器的设计

A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Phase Demodulation Method

提出了一种新的压力传感器的设计,该传感器基于Fabry-Perot腔干涉和波长解调理论测量压力.设计用MEMS技术以及普通的光通讯接插件制作出工艺简单,分辨率高的光纤MEMS压力传感器.阐述了传感器的工作原理,分析了硅膜的厚度对传感器性能的影响以及FP腔的长度对反射光信号的影响.系统采用可调谐激光器进行信号访问,利用反射谱的相位变化完成信号解调.理论分析和模拟计算验证了传感器加工制作方案的可行性.

a new fiber Pressure sensor based on Fabry-Perot （FP） interferometer and phase demodulation method is described. MEMS technique and communication equipment in existence are used to fabricate the sensor. The operating principle of the pressure sensor can be explained by the Fabry-Perot （FP） interferometer model. The characteristic of the silicon membrane is studied and the relationship between the membrane thickness and the sensor performance is illuminated. The influence of the FP cavity length to the sensor performance is showed. Tunable laser is used as the illumination source for the sensor and phase demodulation method is imposed to analyze the signal, which has higher accuracy. The theory can be prepared for the sequent process and fabrication for this optical fiber pressure sensor.