摘要
通过分析MEMS电容开关的工作原理,设计出一种适合分布式射频MEMS移相器电路的新型电容开关.采用Intel-lisuiteTM软件优化电容开关的驱动电压、响应时间、释放时间和机械振动模式.结果表明,开关驱动电压为2.5V、响应时间小于30μs,释放时间大于60μs和所有振动模式固有频率都大于15KHz.与普通开关结构比较,该新型电容开关结构具有优越射频机电性能和响应时间,同时也对电容开关的制备工艺进行分析.
A novel capacitive switches structure for the distributed RF MEMS phase shifters is presented based on the analysis of the operation principle. The driven voltage, response time, release time and vibration modes of the capacitive switch are optimized by the Intellisuite^TM software. The simulation results show the driven voltage of 2.5 V, the response time of low 30 μs, the release time of high 60 μs and vibration frequency of high 15 KHz. This novel capacitive switch structure takes on superiority RF electromechanical performance and response time by comparing with the common structure switches. At same time, the analysis of fabrication processes on the capacitive switch for the distributed RF MEMS phase shifters is performed.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期1881-1884,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助项目(60571026)
哈尔滨工业大学跨学科交叉性研究基金资助(HITMD.2003.07)
关键词
分布式移相器
电容开关
驱动电压
响应时间
释放时间
振动模式
distributed phase shifters
capacitive switches
driven voltage
response time
release time
vibration modes
