面向RFIC的片上铁氧体磁膜电感

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

采用集成工艺制作了片上铁氧体磁膜(Ni0.4Zn0.4Cu0.2Fe2O4,Y2.8Bi0.2Fe5O12和Co7ZrO9)射频微电感.铁氧体薄膜采用溶胶凝胶法制作,高频特性较好,适于片上电感的应用.对电感样品进行了测试和等效电路分析,结果表明,与无磁膜结构相对比,铁氧体磁膜电感显著增强了电感性能,是一种实现小尺寸、高性能片上RFIC电感的很有前景的途径.

On-chip RF integrated inductors with kinds of ferrite thin-films （Ni0.4Zn0.4Cu0.2Fe2O4, Y2.8Bi0.2Fe5O12 and Co7ZrO9） have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RF IC.