摘要
设计、研制了集成有微泵、微沟道、微流量传感器、温度传感器的微流体测控芯片.采用有限元软件ANSYS模拟分析了将其作为冷却芯片时微沟道的散热作用,分析确定了芯片上各元件的结构.该集成芯片为硅-玻璃结构,在硅片上,利用ICP法刻蚀无阀微泵泵体和微沟道;在7740玻璃片上,以溅射、剥离法制作微流量和温度传感器;图形精确对准后硅/玻璃以静电键合方法封接.无阀微泵采用压电元件驱动.测试结果表明:集成芯片具有冷却功能,循环水的流速最大可达25.4mm/s.
The micro-fluidic chip with the micro-pump, micro channel, the micro flow flux sensor and the temperature sensor are designed and fabricated. With the finite element analysis software ANSYS, the heat transfer efficiency of the micro channel on the chip in the cooling system are simulated and analyzed. Then the structure of these devices on the chip are determined. This chip is of the silicone-glass double layer structure： the valve-less micro-pump chamber and micro channel are fabricated with the ICP etching process on the side of the silicone; and the micro flow flux sensor and temperature sensor are fabricated with the spattering and lift-off process on the side of the Pyrex 7740 glass. After the pattern aligned precisely, the glass and silicone are bonded with the electrostatic bonding technique. The valve-less micro-pump is driven by the piezoelectric actuator. The measure results show that this integrated chip has the temperature-control function, and the maximal circulated water flow speed is 25.4mm/s.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期1970-1973,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目资助(620276038)
关键词
微流体
微泵
微流量传感器
温度传感器
micro-fluidic
micro-pump
micro flow flux sensor
temperature sensor
