一种新型硅电容式流速流向传感器的设计

Design of a Novel Silicon Capacitive Flow Sensor

设计了一种基于体微机械加工技术的新型硅电容式流速流向传感器.这种传感器由圆柱型阻流体和支撑梁构成,这种结构将流体的流速流向信息转化为阻流体的位移,通过四组正交电容来测量位移,从而得到流体的流速和流向.理论计算了传感器的结构尺寸并利用有限元分析方法计算了传感器的电容输出.

Based on bulk micromachining, a novel flow sensor is introduced where a column structure converts the flow velocity and direction to displacement. Displacement sense is accomplished using four orthogonal capacitors. The structure parameters were theoretically calculated, and the output capacitance of this device was given by FEA （Finite Element Analysis） methods.