摘要
为实现流体领域的液相传感,设计并制作了基于36°-YXLiTaO3作为压电衬底、PMMA薄膜作为波导层的Love波传感器;通过微电流电铸实验测量得到Love波传感器的质量灵敏度为-2.281g-1cm2.分析了波导层厚度、器件温度和电铸电极的厚度三个因素对灵敏度的影响,为进一步提高灵敏度提供了参考.
For liquid sensing applications in fluid field, Love wave sensors were designed and fabricated on 36°-YX LiTaO3 substrate with PMMA thin film guiding layer. The mass sensitivities of Love wave sensors were measured by electroplating experiment with stable current. The mass sensitivity measures 2. 281g^-1 cm^2. For the farther improvement of sensitivity, the impacts to mass sensitivity of ingredients were analyzed, such as thickness of guiding layer, device temperature and thickness of electroforming cathode.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2126-2129,2134,共5页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助(60474055)
