三轴微机械陀螺仪的结构设计与仿真

Design and Simulation of A Three-Axis Micromachined Gyroscope

提出了一种适应国内加工条件的三轴微陀螺仪,依据三轴陀螺的结构和工作原理,利用ANSYS有限元仿真软件对三轴陀螺的设计进行了计算和仿真.在此基础上,通过调节结构参数实现各轴驱动模态与敏感模态固有频率的匹配以提高各轴的灵敏度.最后介绍了加工所采用的工艺.

A three-axis micromachined gyroscope suitable to our current fabrication condition was proposed. On the basis of the structure and the principle of operation, the three-axis micromachined gyroscope was calculated and simulated by using the finite element software ANSYS. In order to improve the sensitivity of each gyroscope, a method for adjusting the structure parameter that the natural frequencies in drive mode and sense mode was matching is proposed. Finally the fabrication being used was introduced.