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一种Z轴微机械陀螺的自解耦方法研究 被引量：1

Study of a Decoupled Z-Axis MEMS Gyroscope
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摘要 在分析了微机械陀螺机械耦合误差产生原因的基础上,提出了一种解耦梁方案,可以从结构上消除振动式微机械陀螺敏感模态对驱动模态的耦合影响;基于该解耦梁方案设计了一种新型的Z轴微机械陀螺结构.分析表明,该陀螺结构消除了敏感模态对驱动模态的耦合影响,实现了解耦设计的目的. This paper reports a bulk decoupled Z-axis micro-machined gyroscope. 16 decouple beams has been used to decouple drive and sense oscillation modes. That design prevents unstable operation due to mechanical coupling. The coupling of modes has been taken off according to both simulation results in ANSYS and MEMS Garden.
作者 谢建兵 苑伟政 常洪龙
机构地区 西北工业大学
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期2220-2222,共3页 Chinese Journal of Sensors and Actuators
基金 863项目资助(2005AA404240) 国家自然科学基金资助(50505038)
关键词 微机械陀螺 机械耦合 模态耦合 解耦梁 micro-machined gyroscope mechanical coupling modes coupling decouple beams
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
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参考文献8

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二级参考文献2

共引文献1

同被引文献11

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传感技术学报
2006年 第05B期

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