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基于共振隧穿二极管的矢量水声传感器设计 被引量:6

Design of Vector Hydrophone Based on Resonant Tunnelling Diodes
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摘要 提出了一种基于共振隧穿二极管(RTD)的矢量水声传感器,传感器采用共振隧穿二极管作为敏感元件,共振隧穿二极管布置在传感器结构中柱体的四周边缘.两个反方向变化的基于共振隧穿二极管的振荡器的输出信号通过信号处理电路预处理后输入微处理器,计算出声源水平方位角和声压.分析并设计了基于共振隧穿二极管的振荡电路、矢量水声传感器物理结构以及制作工艺,讨论了传感器信号处理方法. A novel digital vector hydrophone using resonant tunnelling diodes(RTD) is presented. The sensitive unit of this vector hydrophone is resonant tunneling diodes which are located on the edge of the pole of hydrophone. The output signal was achieved by subtracting the contrary frequency of the two oscillators based on RTD. The RTD oscillator, physical structures and fabrication process of vector hydrophone are designed, and the signal processing has been discussed.
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期2283-2285,2289,共4页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金项目资助(50405025 50375050) 山西省自然基金资助 博士点基金资助
关键词 共振遂穿二极管振荡器 矢量水声传感器 GaAs微结构 纳机电器件 RTD oscillator Vector hydrophone GaAs microstructure NEMS
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