摘要
实验研究了基于AlAs/InxGa1-xAs/GaAs共振隧穿二极管(RTD)的振荡器的压力-频率转换特性,实验结果表明:该特性具有良好的线性特征,且其线性灵敏度达到0.84kHz/MPa.利用此压力-频率转换特性,首次设计并利用微机械控制孔技术加工制作了基于RTD的GaAs基悬臂式声传感器结构,实现了RTD与GaAs基微机械加工技术的工艺集成.
The Pressure-frequency transform characteristics of oscillator based on AlAs/InxGa1-xAs/GaAs resonant tunneling diode （RTD） have been investigated. The experiment results show that the characteristic is linear and the linear sensitivity is up to 0.84 KHz/MPa. Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2293-2296,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助(50405025
50375050)
