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状态反馈法改善MEMS静电驱动结构瞬时特性的研究 被引量：1

Improvement of Transient Response of Eletrostatically Actuated MEMS An State Feedback Viewpoint
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摘要 MEMS静电驱动结构的瞬时特性受其结构本身机械动态特性的影响,自然阻尼过高或者过低都可能会让系统发生操作偏差.利用状态空间分析法分析了MEMS静电驱动结构的工作机理.基于状态反馈原则设计了一种输入量控制方法,即根据系统要求指标来配置极点,实现最优控制.仿真实验结果证明,该方法能提高系统的瞬时特性. Transient response of electrostatically-actuated MEMS is dominated by their mechanical dynamics. The performance of such system may be poor, if the natural damping of the system is very low or very high. The work mechanics of the electrostatically-actuated MEMS is discussed based on the state space method. Based on the state feedback, one input control strategy is presented to implement optimum control, which allocates poles according to the system requirements. The simulation results demonstrate that the improvement of transient behavior is achieved by proposed strategy.
作者 冯仁剑 于尚民 万江文 吴银锋
机构地区 北京邮电大学自动化学院测控与通信微系统研究中心
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05A期1337-1339,1343,共4页 Chinese Journal of Sensors and Actuators
基金 教育部新世纪优秀人才支持计划资助(NCET-04-0113)
关键词 MEMS静电驱动 瞬时特性 状态反馈 输入量控制 状态空间 electrostatically actuated MEMS transient behavior state feedback input control state space
分类号 TH7 [机械工程—精密仪器及机械] TN6 [电子电信—电路与系统]
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参考文献8

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  • 1车录锋,徐志农,熊斌,王跃林.力反馈微加速度计的准静态和阶跃响应模型[J].机械工程学报,2004,40(10):102-108. 被引量：2
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  • 5P Touboul, B Foulon, M Rodrigues. In orbit nano - g measurements lessons for future space missions [J]. Aerospace Science and Technology,2004, ( 8 ) :431 - 441.
  • 6Bao M H, Yang H, Yin H. Effects of electrostatic forces generated by the signal on capacitive sensing devices[J]. Sensors and Actuators A, 2002, ( 84 ) : 213 - 219.
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  • 8Chau K H L, Lewis S R, Zhao Y. An integrated force - balanced capacitive accelerometer for low - g applications [J]. Sensors and Actuators A, 1996, (54) :472 - 476.
  • 9V Iafolla, S Nozzoli. Italian spring accelerometer (ISA) a high sensitive accelerometer for "BepiColombo" ESA CORNERSTONE [J]. Planetary and Space Science, 2001 ,(49) : 1609 - 1617.
  • 10WU Shu -ehao, HUANG Yu, FAN Shu -hua. Measurement of the Floor Tilt in the Experimental Determination of the Gravitational Constant [ J ]. CHIN. PHYS. LETT, 2003, (20) :1210 - 1213.

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传感技术学报
2006年 第05A期

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