摘要
提出基于受力分析与能量原理建立等效集总力学描述的思想,实现对机电耦合MEMS悬臂梁动态行为的系统级模拟.利用受控源的反馈作用实现耦合,所建立的等效电路可用于模拟静电驱动下悬臂梁的转移特性、瞬态响应与固有频率.与Saber模拟的数据进行对比,证实了该方法的有效性.
The idea of establishing the equivalent lumped mechanical description based on the mechanical analysis in combine with the energy principle is proposed, which is used for implementing the system-level simulation of the dynamic behavior of the eletro-mechanical coupled cantilever beam. By making use of the feedback function of the controlled sources to implement the coupling, the established equivalent circuits can simulate the transfer characteristic, transient response and inherent frequency of the beam under electrostatic loads. Simulation from Saber has confirmed the validity of the method.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05A期1376-1380,共5页
Chinese Journal of Sensors and Actuators
关键词
MEMS设计
系统级模拟
力学描述
等效电路
受控源
MEMS design
system-level simulation
mechanical description
equivalent circuit
controlled source