基于α∶CH薄膜的微齿轮的制备

Micro-Gear Fabrication Using Amorphous Carbon Films

采用低压等离子体化学气相沉积技术在硅片上制备出α∶CH薄膜,以金属铝作为掩膜,利用电子回旋共振微波等离子体反应离子刻蚀法制备微齿轮,再用化学腐蚀的办法将所制备的齿轮从硅片上剥离下来,最后清洗干净后用毛细管把微齿轮组装到一个固定的转轴上.扫描电子显微镜(SEM)测量表明,所得的微齿轮直径270μm左右,厚度12μm左右,表面平整,侧壁陡直.

Amorphous carbon films deposited on silicon substrate using low pressure plasma chemical vapor deposition（LPP-CVD） techniques. Micro-gear made of amorphous carbon films fabricated on silicon substrate vie the technique of oxygen-reactive ion etching（RIE） under an Al mask. Micro-gear was released from the substrate using HNA solutions and assembled on the axis by handwork. The result of Scanning Electron Microscopy（SEM） measurement show that the micro-gear with smooth surface and vertical sidewall ,the thickness and diameter of the micro-gear is 270 μm and 12 μm.