摘要
采用低压等离子体化学气相沉积技术在硅片上制备出α∶CH薄膜,以金属铝作为掩膜,利用电子回旋共振微波等离子体反应离子刻蚀法制备微齿轮,再用化学腐蚀的办法将所制备的齿轮从硅片上剥离下来,最后清洗干净后用毛细管把微齿轮组装到一个固定的转轴上.扫描电子显微镜(SEM)测量表明,所得的微齿轮直径270μm左右,厚度12μm左右,表面平整,侧壁陡直.
Amorphous carbon films deposited on silicon substrate using low pressure plasma chemical vapor deposition(LPP-CVD) techniques. Micro-gear made of amorphous carbon films fabricated on silicon substrate vie the technique of oxygen-reactive ion etching(RIE) under an Al mask. Micro-gear was released from the substrate using HNA solutions and assembled on the axis by handwork. The result of Scanning Electron Microscopy(SEM) measurement show that the micro-gear with smooth surface and vertical sidewall ,the thickness and diameter of the micro-gear is 270 μm and 12 μm.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05A期1398-1400,共3页
Chinese Journal of Sensors and Actuators
基金
中国工程物理研究院重大基金项目资助(2005Z0805)