带三维结构的惯性MEMS器件的微细铣削加工

Micro Milling of the Inertial Components with 3D structure

将微细铣削技术应用到了带三维微结构的惯性MEMS器件的加工中.该类惯性MEMS器件由高弹性合金制作,特征尺寸在10μm^200μm,加工精度要求在±1μm,而且对加工残余应力有较高要求.利用自行研制的三轴联动微小型精密铣床,在研究了微径铣刀的悬伸量、径向切深、每齿进给量等切削参数对切削力影响的基础上,提出了最佳切削参数,成功实现了该器件的加工,并采用微桥法对其弹性模量和残余应力进行了测量.

Micro Milling technology is used in the manufacturing of the inertial MEMS components with 3D micro structures. This kind of inertial MEMS components are made of high-performance elastic alloy with characteristic dimension of 10μm-100μm and machining accuracy of ±1μm. It also has strict requirement on the residual stress. With the self-designed 3 axis micro milling machine, the optical cutting parameters are studied and the components are successfully manufactured. With micro-hridge method, elastic modulus and residual stress are measured.