摘要
相位解包裹是使用相移显微干涉法测量MEMS/NEMS表面3-D轮廓时的重要步骤.本文针对普通的相位解包裹方法在复杂轮廓或包含非理想数据区的表面轮廓测量中的局限性,提出一种基于模板的广度优先搜索相位展开方法.通过模板的使用,先将非相容区域标记出来,在相位解包裹的过程中绕过这些区域,即可得到准确可靠的相位展开结果.通过具体的应用实例可以证明,使用不同模板可以根据不同应用的需要灵活而准确地实现微纳结构表面3-D轮廓测量中的相位展开.
Phase unwrapping is a vital procedure in measurement of 3-D surface profile of MEMS/NEMS structures using microscopic interferometry. In order to solve the problem that ordinary phase unwrapping methods are not competent in the measurement of surfaces with complicated profile or/and nonideal data areas, a breadth-first search phase unwrapping algorithm based on template is presented. Inconsistent points are flagged in a template image first and then ignored during phase unwrapping, so that more correct result can be obtained. Some practical examples manifest that according to different requirements of applications, phase unwrapping can be achieved flexibly and accurately employing different kinds of templates.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05A期1488-1492,共5页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金重点资助项目(50535030)
