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基于数据采集的MEMS薄膜材料参数在线测试系统 被引量：1

Measurement System for in-situ Extracting Material Parameters of MEMS Thin Film Based on Data Acquisition
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摘要 建立了一套基于数据采集的MEMS薄膜材料参数在线测试系统.该系统包括测试图形,测试信号处理电路及外围附件和专用软件,能自动完成薄膜材料参数的在线测试.测试方法和测试设备简单,能用于工艺线上的在线测试. A measurement system for in-situ extracting material parameters of MEMS thin film was proposed based on Data Acquisition. The system consisted of test structures, managing circuits of test single and periphery accessory, special software. It can automatically perform the on-line material parameters testing for the thin film. The test methods and equipments were simple and can be used to in-situ measurement on process.
作者 李巧萍 李伟华
机构地区 东南大学MEMS教育部重点实验室
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05A期1535-1537,1541,共4页 Chinese Journal of Sensors and Actuators
基金 国家杰出青年科学基金资助项目(批准号:50325519)
关键词 MEMS 数据采集 材料参数 在线测试 MEMS data acquisition material parameter in-situ measurement
分类号 TN403 [电子电信—微电子学与固体电子学] TN37 [电子电信—物理电子学]
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参考文献9

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二级参考文献27

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传感技术学报
2006年 第05A期

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