期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

利用3ω法同时测量Nd:YAG晶体及其表面SiO_2/ZrO_2增透膜导热系数 被引量：1

Simultaneous Measurements of Thermal Conductivities of Nd:YAG Crystal and SiO_2/ZrO_2 Antireflective Films by 3ω Method
下载PDF
导出
摘要 建立了适用于高频测量的3ω测试系统.对于薄膜/衬底复合结构,在低频范围内采用斜率-求差-3ω法,同时确定了单层薄膜和衬底的导热系数.采用低频和高频测量相结合的方法测量了Nd:YAG晶体和(111)面上微/纳米ZrO2/SiO2多层增透薄膜中各层的导热系数.进行了不确定度分析.建立的测量原理和测试系统可用于基体表面多层薄膜以及微纳米器件热物性的表征. The 3ω measurement system was setup for high frequency. The slope-differential-3ωmethod was applied to simultaneously determine the thermal conductivities of s single layer/substrate composite structure. The thermal conductivities for Nd： YAG crystal and ZrO2/SiO2 multi-layered antireflective films on its （111） surface were obtained with the combined measurements over low and high frequency range. The uncertainty analysis was presented. The comparison between the measured results and reference data justified the method. The 3ω setup and the principle can be employed to characterize the thermal properties of the multi-layered structure and micro/nano-system.
作者 王照亮 唐大伟
机构地区 中国科学院工程热物理所
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05A期1545-1549,共5页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金(50376066) 中国科学院"百人计划"资助课题
关键词 3ω 法 导热系数 增透膜 微/纳米膜 3ωmethod thermal conductivity antireflective film micro/nanofilm
分类号 TN244 [电子电信—物理电子学]
  • 相关文献

参考文献15

  • 1Mtiller E, Draar C, Sehilz J and Kaysser W A. Functionally Graded Materials for Sensor and Energy Applications. ? Materials Science and Engineering A [J]. 2003, 362.. 17-39.
  • 2周维军,袁永华,桂元珍,沈志学.1.06μm连续激光辐照TiO_2/SiO_2/K_9薄膜元件温升规律研究[J].强激光与粒子束,2005,17(9):1307-1311. 被引量：13
  • 3龚辉,李成富,王明利.激光对光学薄膜损伤的热冲击效应[J].中国激光,1996,23(3):245-248. 被引量：15
  • 4Cahill D G. , Pohl R O. Thermal Conductivity of Amorphous Solids above the Plateau [J]. Phys. Rev. B [J]. 1987, 35(8):4067-4073.
  • 5Cahill D G. Thermal Conductivity Measurement from 30 to 750 K: the 3ω Method [J]. Rev. Sci. Instrum [J]. 1990, 61(2): 802-808.
  • 6Yamane T, Nagai N, Katayama S, Todoki M. Measurement of Thermal Conductivity of Silicon Dioxide Thin Films Using a 3ω Method. J. Appl. Phys. [J]. 2002, 91(12):9772-9776.
  • 7Ahmed S, Liske R, Wunderer T et al. Extending the 3ω Method to the MHz Range for Thermal Conductivity Measurements of Diamond Thin Films. Diamond and Related Materials[J]. 2006, 15, 389-393.
  • 8Holland LR, Smith RC. Analysis of Temperature Fluctuations in ac Heated Filaments. J. Appl. Phys. [J].1966, 37(12):4528-4536.
  • 9Dames C, Chen G. 1ω 2ω and 3ω Methods for Measurements of Thermal Properties [J]. Rev. Sci. Instrum, 2005,76(12): 124902.
  • 10Carslaw H S, Jaeger J C. Conduction of Heat in Solids[M]. (Oxford University Press, Landon, 1959).

二级参考文献9

共引文献26

同被引文献15

  • 1David G Cahill, Pohl R O. Thermal conductivity of amorphous solids above the plateau [ J ]. Phys. Rev. B. , 1987,35 (8) :4067 - 4073.
  • 2David G Cahill, Henry E Fischer, et al. Thermal conductivity of thin films : Measurements and understanding[ J]. J. Vac. Sci. Technol. A, 1989,7(3) :1259 - 1266.
  • 3David G Cahill. Thermal conductivity measurement from 30 to 750K: the 3to method [ J ]. Rev. Sci. Instrum, 1990,61 (2) :802 - 808.
  • 4David G Cahill, Katiyar M, Abelson J R. Thermal conductivity of α - Si : H thin films [ J ]. Physical Review B, 1994,50:6077 - 6081.
  • 5Swartz E T, Pohl R O. Phonon Scattering in Condensed Matter V[M]. edited by Anderson A C and Wolfe J P, Berlin, 1986,228.
  • 6Lee S - M, Kwun - S - II. Heat capacity measurement of dielectric solids using a linear surface heater: Applica- tion to ferroelectrics [ J ]. Rev. Sci. Instrum. , 1994,65 (4) :966-970.
  • 7Moon I K,et al. The 3ω technique for measuring dynamic specific heat and thermal conductivity of a liquid or solid[ J]. Rev. Sci. Instrum. , 1996,67 ( 1 ) :29 - 35.
  • 8胡明雨.薄膜热物性实验研究:[硕士论文][D].东南大学.
  • 9Borca -Tasciuc T, et al. Data reduction in 3ω method for thin- film thermal conductivity determ- ination [J]. Rev. Sci. Instrum., 2001,72(4):2139-2147.
  • 10S-M Lee,David G Cahill. Heat transport in thin dielectric films[J]. J. Appl. Phys., 1997,81(6):2590-2595.

引证文献1

传感技术学报
2006年 第05A期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部