基于柔性铰链的热驱动微夹钳的实验和仿真分析

Experimental Analysis and Simulation of Microgripper with Flexure Hinge

微执行器在整个微机电系统中直接面对其应用对象,需要满足定位精度高,稳定性好,响应速度快,控制方便的要求.柔性铰链以其特殊的性能广泛应用于操作执行器的设计应用中.以一种基于柔性铰链的电热驱动微夹钳为研究对象,通过实验和ANSYS有限元仿真分析对微夹钳的机械性能进行了分析,发现微夹钳端部的输出位移与输入电压基本呈线形关系.通过仿真分析探讨了柔性铰链结构尺寸变化对微夹钳性能的的影响.

The Micromanipulator, which is directly contact with the applied object in Micro Electro-Mechanical System, should have high setting accuracy, high stability and high response speed and be easy to control. The flexure hinge is widely used in the micromanipulator due to its special natures. This paper is studying a kind of electrothermal-actuating microgripper with flexure hinge. The mechanical behavior is studied by the way of doing experiment and FE Analysis. The result indicates that the deflection of the microgripper is approximately proportional with the change of voltage. And the different characters of the microgripper with different configuration of flexure hinge are simulated using ANSYS.