一种低成本光通信用MEMS可变光衰减器

Low Cost MEMS Variable Optical Attenuator for Optical Telecommunication Application

介绍了一种采用新型体硅微机械加工工艺研制的低成本光通信用微机械可变光衰减器.根据光通信系统对可变光衰减器的插入损耗低、动态衰减范围大、响应时间短等技术要求,对器件的机械模型结构和光耦合模型结构进行了分析.测试表明器件的动态衰减范围≥50dB,插入损耗≤0.8dB,回波损耗≤-45dB,波长相关损耗≤0.2dB,偏振相关损耗≤0.25dB,响应时间<1ms.

This paper presents a low cost MEMS variable optical attenuator（VOA） fabricated by a novel bulk-silicon micromachining technology for the optical communication applications. According to the specifications such as low insertion loss, large attenuation range, high responding speed and so on, which are demanded in optical communications for VOA, the mechanical and optical models of the designed VOA are employed for the optimization design of the structures. Performance measurements of the fabricated VOA shows that the insert loss≤0. 8 dB, the attenuation range≥50 dB, the return loss≤-45 dB, the wavelength dependent loss≤0. 2 dB, the polarization dependence loss≤0. 25 dB and the responding time〈1ms.