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微型可编程光栅光谱模拟特性及其应用研究 被引量:1

Micro Programmable for Synthesizing Spectra Grating and the Application Research
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摘要 研究了基于MOEMS技术的微型可编程光栅的光学特性.对平行复色光正入射时微型可编程光栅的衍射场进行了理论分析,分析表明可以通过对可编程光栅编程状态的预先设定,使其衍射输出对应于不同目标物质的光谱,即模拟光谱.最后介绍了微型可编程光栅的光谱模拟特性在相关光谱检测法中的应用,分析了其相对于传统方法的优点. The optical characteristic of micro programmable grating is investigated. When an incident light is collimated from vertical direction, the diffractive field of programmable grating is analyzed. It is shown that the state of the micro programmable grating can be prescribed and the diffractive emergent light will correspond to spectra of target substance, i.e. synthetic spectra. Finally, the application of the micro programmable grating in correlation spectroscopy and its advantages in comparison with the traditional approach are introduced.
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05A期1754-1756,1760,共4页 Chinese Journal of Sensors and Actuators
关键词 MOEMS 可编程光栅 光谱模拟 相关光谱法 MOEMS programmable grating synthetic spectra correlation spectroscopy
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