溶胶-电雾化法在光纤表面制备PZT薄膜

Preparation of PZT Films on Optical Fiber by Sol-ESD Method

首次提出了使用溶胶-电雾化法在光纤表面制备PZT压电陶瓷薄膜,分析了光纤表面PZT压电陶瓷薄膜的成膜机理与特点,系统的研究了溶胶-电雾化法制备PZT压电陶瓷薄膜的特点,并分析了前驱液浓度、电雾化条件、PZT压电陶瓷薄膜沉积过程温度等因素对于PZT压电陶瓷薄膜的表面质量的影响.针对整个工艺过程进行了优化,最终得到了表面质量较好的PZT压电陶瓷薄膜.

Electrostatic spray deposition （ESD） method is introduced to preparing PZT films on optical fiber surface. The characteristics and mechanism of this method is analyzed. The effect of precursor concentration, substrate temperature and heat treatment on the surface quality of PZT film is investigated. Finally the processing parameters are optimized and good quality films are obtained.