ZnS:Mn沉积温度对薄膜电致发光器件亮度的影响

Influence of ZnS : Mn Deposition Temperature on TDEL

采用丝网印刷技术,在Al2O3陶瓷基板上印刷、高温烧结内电极及绝缘层,制备出陶瓷厚膜基板,进而制备了新型厚膜电致发光显示器(TDEL)。整个器件结构为陶瓷基板/内电极/厚膜绝缘层/发光层/薄膜绝缘层/ITO透明电极。研究不同基板沉积温度对发光层性能的影响,并对器件的亮度-电压、亮度-频率进行测量。结果显示较高的ZnS:Mn沉积温度明显提高了无机发光器件的发光亮度。其原因主要是由于高的沉积温度提高了ZnS:Mn的成膜质量,提高膜层微晶尺寸大小,从而发光亮度提高。但是我们发现温度继续提高的同时,器件发光亮度趋于饱和,分析原因是由于掺杂Mn浓度过高,影响了发光效果。

With screen-printlng technique, a ceramic thick film substrate was fabricated by printing and sintering Ag/Pt alloy internal electrodes and high dielectric constant ceramic thick film insulating layer on Al2O3 ceramic substrate. Thereby a novel thick dielectric electroluminescent （TDEL） device was prepared by using the ceramic thick film substrate. The whole structure of the device is ceramic substrate/internal electrodes/thick dielectric film/light-emitting layer/thin dielectric film/ITO. The article strndied the influence of ZnS ： Mn deposition temperature on brightness of thin film electroluminescence. The dependences of brightness on voltage and frequency were measured, respectively. Result shows that a thick film electroluminescent device has higher brightness while increased the deposition temperature. Because the dimension of crystallite of the ZnS ： Mn thin film improved with higher deposition temperature, the performance of the device improves obviously. But the brightness of the device becomes saturated with the temperature increasing, the concentration of Mn increased with higher deposition temperature.