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表面应力测量SOI压阻悬臂梁传感器设计与优化 被引量：1

Design and Optimization of SOI Piezoresistive Microcantilever Sensors for Use in Surface Stress Measurement
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摘要 研究了基于SOI(silicononinsulator)工艺的压阻悬臂梁传感器的静态和动态特性,推导了其用于表面应力测量时灵敏度和分辨率的表达式.分析了各种参数对性能的影响,提出了参数设计与优化的流程.得到了一套灵敏度为-1·8×10-3m/N,分辨率为8·5×10-5N/m,弹性系数为0·023N/m,谐振频率为1·3×104Hz的设计参数. The dynamic and static characteristics of SOI piezoresistive microcantilever sensors are studied. Expressions for predicting the sensitivity and resolution of sensors used in surface stress measurement are derived. According to analysis of the influence of the parameters on the performance of the sensors, a parameter design and optimization process is presented. A suit of design parameters is deduced, with a sensitivity of - 1.8 × 10^- 3 m/N, a resolution of 8. 5 × 10^- 5 N/m, an elasticity coefficient of 0. 023N/m,and a resonance frequency of 1.3 × 10^4 Hz.
作者 庄志伟 王喆垚 刘理天
机构地区 清华大学微电子学研究所
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第10期1844-1850,共7页 半导体学报（英文版）
基金 国家自然科学基金(批准号:60401009) 清华大学基础研究基金(批准号:JC2003061)资助项目~~
关键词 MEMS 压阻 SOI 表面应力测量 悬臂梁 传感器 MEMS piezoresistive SOI surface stress measurement cantilever sensor
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
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参考文献24

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共引文献1

同被引文献11

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二级引证文献2

Journal of Semiconductors
2006年 第10期

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