微谐振式低速气体流速传感器的有限元模拟(英文)

FEA Simulation of Resonant Low-Velocity Gas Flow Microsensor

提出一种基于昆虫风速接受器的微谐振式仿生传感器,用以测量低速气体流动．由于设计的复杂性,使用有限元模拟对其进行评估．基于有限元模拟得到流体雷诺数与其绕流无限长梁的粘滞系数的数值关系,从而有助于确定该传感器的线性工作范围．使用有限元模拟进行流体结构耦合分析,得到气体流速与固有频率偏移的数值关系．有限元模拟结果证实当雷诺数小于1时,传感器的输入与输出呈现线性关系,其灵敏度为1．6Hz/(cm·s^(-1)．

A novel resonant microsensor modeled on wind receptor of insects which can detect low velocity gas flow is demonstrated. To further evaluate this design, FEA simulation based on ANSYS is used. The relationship between Reynolds number and drag coefficient of infinite long beam which helps determine linear region of this mierosensor is obtained numerically. Fluid-structural coupled analysis is conducted to find the relationship between velocity of gas flow and frequency shift of this mierosensor. The result of FEA simulation shows that when Reynolds number is below 1, there exists linear relationship between input and output of this mierosensor whose sensitivity is 1.6 Hz/（cm ·s^-1 ）.