摘要
超精密微位移系统的定位精度除了与其本身的特性有关外,还与工作环境等因素密切相关。本文系统地分析了温度对压电陶瓷微驱动器、微进给工作台和检测元件的影响。采用有限元方法给出了微进给工作台在环境温度发生变化时的变形云图,说明了温度影响微进给工作台定位精度的原理。对各种检测元件受温度的影响进行了分析对比。最后从环境温度的控制、材料选择和检测元件3个方面给出了解决的措施。
The positioning accuracy of ultra - precision flexure - hinge guided micro - feed system is related with piezoelectric actuator, micro- feed stage, sensors, control system and environment conditions and so on. The effect of temperature on piezoelectric actuator, micro - feed stage, testing parts was analyzed, the change of micro - feed stage with the environmental temperature was simulated with finite element method, the principle that temperature influences the position precision of micro - feed stage was introduced. Solutions were brought forward from three facets ： the control of environmental temperature, the choice of materials and testing parts.
出处
《机床与液压》
北大核心
2006年第10期33-36,共4页
Machine Tool & Hydraulics
关键词
微进给工作台
压电陶瓷
温度
有限元法
微位移
Micro- feed stage
Piezoelectric actuator
Temperature
Finite element method
Micro- feed
