微/纳米尺度硬度测量技术及研究

Measuring Principles of Micro/Nano-hardness Techniques and its Development

硬度综合反映了材料的弹性、塑性等一系列物理性能,是材料力学性能的一个重要参数。传统硬度测试技术在微纳米尺度已不再适用。本文介绍了微纳米尺度硬度的静态和动态测试机理,分析了纳米硬度计的测试特点,并对测量误差产生的可能原因做了说明。最后简要分析了微纳米硬度测试技术的发展趋势。

Hardness is the impartment part in the research on the mechanical properties. It indiacates the physical properties of the material such as elasticity, plasticity and so on. Now the traditional hardness measuring techniques is not applicable to the micro/nano scale. The theories and principles of the micro/nano - hardness measuring techniques were introduced, its characteristics were analyzed, and the possible reason of the error was given. The development of this measuring technique was illustrated.