真空蒸发制备Zn(S,Se)薄膜及其性能研究

PROPERTY STUDY OF Zn(S,Se) THIN FILMS PREPARED BY VACUUM EVAPORETION

利用真空蒸发技术在ZnS粉末中掺入不同比例的Se粉末作为源材料,选择合适的工艺条件在玻璃衬底上获得了性能稳定的Zn(S,Se)薄膜,薄膜为纤锌矿结构,具有沿[002]晶向的择优取向。Zn(S,Se)薄膜为n型材料呈高阻状态,在可见光范围内具有良好的透过率。随Se成分的增加薄膜由无色透明变为橘黄色透明,吸收限向长波方向移动。

Using different proportion of the chemical composition of ZnS and Se powder, the various Zn（S, Se）films with stable proporty could be obtained on the glass substrates by propor vacuum evaporation technique. The crystalline structure of thin films is sphalerite.Their preferred crystalline orientation is along with[002]. The Zn（S,Se） films are n-type and show high resistivity. All the films have high transmissivity in visible light range. The absorption edges of Zn（S, Se） films can be continuously shifted to long wave when increasing Se content in the films, and the colors of the films were found to vary from colorless to orange transparent.