摘要
激光实时点扫描成象已成为一种深具潜力的监测与研究手段，并具有在半导体工业、荧光显微成象和生物诊断领域广泛应用的前景。本文讨论利用激光点扫描成象的基本原理和检测光路的实现；讨论影响扫描成象的基本因素和扫描成象的技术指标。
The galvanometer based point scanning system was designed for real time image capture system for applications from semiconductor inspection to biological diagnostics. To assess the performance of galvanometer scanners, an imaging system was built and detected for its linearity, pixels stability and gray scale uniformity. It is shown that laser point scanning imaging has powerful capability in fast and high resolution applications. A kind of experiment was done for inspection of the surface of railway wheel pivot.
出处
《铁道学报》
EI
CSCD
北大核心
1996年第6期76-82,共7页
Journal of the China Railway Society
