化学气相沉积ZnS块材料的均匀性

The Uniformity of ZnS Bulk Materials Prepared by Chemical Vapor Deposition

本文以Ｈ２Ｓ与Ｚｎ为原料，通过化学气相沉积制备了ＺｎＳ块材料。分析了ＺｎＳ的沉积过程机理，研究了沉积参数如沉积温度、沉积区压力和Ｈ２Ｓ、Ｚｎ蒸汽、载气Ａｒ流量对ＺｎＳ厚度均匀性的影响规律，提出了改善ＺｎＳ厚度均匀性、抑制沉积表面球状物生长的途径。

ZnS bulk materials have been prepared by chemical vapor deposition from H2S and Zn. The deposition process mechanics of ZnS was analyzed.The effect of deposition parameters such as deposition temperature, pressure and flow volume of H2S,Zn vapor and Ar on the thickness uniformity of ZnS was studied,and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.