新型掺杂LiAlO_2晶体衬底研究

Study on a Novel Ti-doped LiAlO_2 Crystal

本文系统研究了L iA lO2晶体及掺钛0.2%原子分数L iA lO2晶体的水解性能,用原子力显微镜对(100)晶片在不同水解时间下的表面形貌进行了观察,对比发现这两种晶体的(100)面均具有极性和易水解性。同时观察到掺钛L iA lO2晶体的抗水解性比纯L iA lO2晶体更好,因为掺钛L iA lO2晶体有更多的L i空位,水解的活性得到降低。

In this paper, the hydrolytic properties of pure LiAlO2 and Ti-doped LiAlO2 single hydrolysis had been systematically studied. The surface morphologies of （100） wafers after different hydrolysis time had been observed by AFM. It was found that（100） planes of these two kinds of crystals had polarity and easily hydrolytic properties. Because more Li vacancies in Ti： LiAlO2 crystal made the ability of hydrolytic reduce, Ti： LiAlO2 crystal had stronger anti-hydrolytic property comparing with pure LiAlO2.