超高压气体放电光源玻壳材料退火工艺研究

The Study of Exceed High Pressure Gas Discharge Lamp's Bulb Annealing

通过分析石英材料粘度与温度的关系,得出了石英的退火温度范围.结合超高压气体放电光源的要求,对玻壳精密退火工艺进行研究.该工艺充分考虑了因玻壳厚度和降温造成的应力.给出了工艺参数的计算方法,增加了慢速降温阶段,减少了玻壳的剩余应力.

Analyzing the relation between viscosity and temperature in quartz, we obtain scope of annealing temperature. The process of annealing is studied according to the need of exceed high pressure gas discharge lamp. The stress, which is makes the thickness of bulb and descending temperature, is considered in the process. The process parameter is introduced. The procedure slowly descending in temperature is added. The remaining stress in bulb is reduced.