摘要
介绍一种基于非本征F-P腔（extrinsic Fabry-Perot cavity）的干涉／强度调制型光纤低压传感器。给出低压传感探头的结构设计和测量原理。利用石英膜片对光纤EFPI压力传感头进行压力测量灵敏度放大；通过不同谱宽的两路光信号的自补偿运算，提高系统的稳定性和抗干扰性。该传感器在0～1．5×10^5Pa的压力测量量程内，压力变化最小分辨率达到50Pa，在连续15h的动态测量下，测量偏差为0．1％FS。
The measuring principle of low pressure sensors based on fiber optical Fabry-Perot interference and intensity is described. An EFPI pressure sensor and a pure quartz membrane mainly compose the low pressure measuring sensor probe. According to the design of the quartz membrane, a low pressure measurement sensor with a range of 0 - 0.15 MPa was achieved. Under measurements of the Fabry-Perot intefferometric/intensity modulated single-mode fiber sensing system, a minimum pressure resolution of 50Pa and an accuracy of 0.1% were obtained over the full pressure measurement range.
出处
《仪表技术与传感器》
CSCD
北大核心
2006年第10期8-10,共3页
Instrument Technique and Sensor
基金
国家自然科学基金海外青年学者合作研究基金资助项目(60028505)
