Cr离子注入TiO_2薄膜光催化性能改进及光谱研究

A STUDY ON UV-VIS SPECTRA AND PHOTO CATALYST OF TiO_2 FILMS BY Cr ION IMPLANTATION

在TiO2薄膜表面注入Cr离子以提高TiO2薄膜在可见光条件下的光催化能力,通过对薄膜紫外可见光谱的测试,表明注入并退火处理后的TiO2薄膜光学带隙减小.以甲基橙为降解物的光催化试验表明,Cr离子注量Φ为1×1016cm-2时,薄膜在可见光下的光催化能力最佳.

With the purpose of improving the photocatalytic ability of the nano-film of TiO2, Cr ions are implanted into the surface of the film by using metal vapor vacuum arc （MEVVA） implantor. The UV-Vis spectra show that the optical band gap of TiO2decreases as the amount of implanted Cr ions increases. Methyl orange （MO） in aqueous solution is catalyzed by the visible light. The maximum degradation of MO is found for a Cr ion implanted fluence of 1×10^16 ions cm^-2.