燃焰法沉积金刚石薄膜的实验研究

Experimental Study on Deposition of Diamond Films by Combustion Flame CVD

研究分析了燃焰法沉积金刚石薄膜时基片表面处理状态、燃烧气体流量比（Ｏ_２／ＣＨ_２）、基片温度对薄膜成核密度、质量和晶体形态的影响。结果表明，在不同粒度的研磨粉研磨的基片表面上金刚石薄膜成核密度不同；燃烧气体流量配比对金刚石薄膜的质量影响很大；基片温度是影响金刚石薄膜晶体形态的一个重要因素。

The effect of the substrate surface pre-treatment conditions,the oxygen to acetylene flow ratio and substrate surface temperature on the nucleation density,the quality of diamond films and the crystal morphologies are investigated.The results show that the diamond powder size for grounding substrate surface has strong effect on the nucleation density of diamond,the oxygen to acelylene flow ratio affects the quality of diamond films and the substrate surface temperature is an important factor affecting crystal morphologies of dismond films