金刚石薄膜中晶粒尺寸的研究

Study On Sizes of Particles in Diamond Films

扫描电子显微研究表明，化学汽相沉积的金刚石薄膜中晶粒大小比较均匀，但随着沉积时间和薄膜厚度（即层数）的增加，晶粒逐渐变大，且每一层内，存在少量的大金刚石颗粒。讨论了晶粒尺寸变化和大晶粒形成的原因和机制。

SEM analysis show that the sizes of particls in CVD diamond films are relatively uniform, but would become larger with the increase of deposition time and number of film layers.In each film layer,there are a few large diamond particles.The size inerease of particles and forming mechanism of large diamond particles were discussed.