高分辨扫描电子显微学

本文区分了三种扫描电镜．即普通电子枪扫描电镜．场发射电子枪扫描电镜以及场发射枪低象差物镜扫描电镜；指出．了后两种扫描电镜对高分辨扫描电子显微学的重要意义。详细评述了高分辨扫描电子显微学中的电子范围的概念，二次电子的发射特性．二次电子象中所包含的信息以及高分辨率下试样表面导电膜的喷涂的要求和方法。

Three kinds of SEM,i. e. conventional,field emission gun, and field emission gun with low aberrationcoefficients objective lens SEM are defined. The significance of the latter two kinds of SEM to the high resolution scanning electron microscopy is emphasized. The .concepts of electron range,emission characteristics of secondary electrons,the information included in secondary electron imageq,and high resolution coating are reviewed in detail.