摘要
本文综合分析了立方氮化硼（ｃ－ＢＮ）膜的制备方法，介绍了ｃ－ＢＮ膜的结构及其机械、电学、光学和热学性能。最后总结了ｃ－ＢＮ膜在机械和电子领域的应用概况。
The preparation techniques of cubic boron nitride (c BN) films are reviewed in this paper. Its structure and mechanical、 optical and thermal properties are also introduced. And the applications of the c BN films in the field of machinery and electronics are summarized.
出处
《材料科学与工程》
CSCD
1996年第3期6-10,共5页
Materials Science and Engineering
关键词
C-BN
制备
性能
立方氮化硼
超硬材料
Cubic boron nitrid(c BN) films, Preparation, Property, Applications
