摘要
在磁场中生产单晶是八十年代发展的新技术。它能大大改进单晶的性能以满足半导体工业的需要,本文介绍了在磁场中生长单晶的基本原理、对磁场的要求及实现磁场的方法。分析比较表明,对于较大直径的单晶炉,使用超导磁场能减少磁体体积及重量,大大节省运行费用,较永磁和电磁铁有明显的优越性。
The technology of crystal growth in magnetic field is a new technologypeveloped in the 80s of this century,which has improved the crystal qualitygreatly for meeting the demand of the semiconductor industry.In this paper,the general principle,the skill's demands,and the practical method areintroduced.To compare with the use of permanent magnet and electric magnet,we concluded that:the volume,the weight and the operational cost could bedecreased tremendously for the large diameter crystal furnance,with the usef superconductor.So by further analysis,it can be seen that the use ofsuperconducting magnet has obvious advantage and it is superior to the useoof other types of magnet.
出处
《电工电能新技术》
CSCD
北大核心
1990年第1期44-51,64,共9页
Advanced Technology of Electrical Engineering and Energy
