类金刚石(DLC)膜结构的研究概况

A Review of the Study on the Structure of Diamond-Like Carbon Films

类金刚石膜是一种非晶结构的薄膜。关于其原子排列结构仍是目前研究的主要方向。本文从实验研究和理论研究两方面综合介绍类金刚石膜的研究概况,并介绍了类金刚石膜的实验研究方法和理论模型。

Diamond-Like carbon films is one kind of amorphous films, its stucture is still a main matter of research. The theoretical and experimental study on the structure of DLC films are reviewed in this paper. The methods of experimental study and the theoretical models of the structure of DLC films are also introduced.