硅液相外延的溶剂选择

Selections of Solvents for Si Liquid Phase Epitaxy

本文系统综述了硅液相外延中对各种溶剂的选择。重点叙述了Cu、Ga、Au、In、Sn、Pb等纯金属及Ag基、Au基、Al基合金作为溶剂,对硅液外延薄膜的影响。最后指出只要根据器件对外延层及工艺成本等的要求,可以找到适当的溶剂材料进行硅液相处延。

The paper summerizes how to select proper solvents for liquid phase epitaxy of Si. The effect on the properties of Si epi-layer, which grows from pure metal solvent such as Cu、Ga、Sn、Au and Ag、Au or Al based alloys are detailly discussed. It's pointed out that a suitable solvent can be selected according to device requirement for the epi-layer and the cost of the technology.