离子束增强沉积技术制备MoS_2固体润滑膜

Ion beam Enhenced Deposition Technique In Preparing MoS_2 Film

本文综述了离子束增强沉积技术的主要特点及其在制备固体润滑膜(MoS_2)方面的最新研究结果。与传统溅射沉积技术比较,其优势在于:易于获得沿 basal 面的择优取向分布,膜层结构致密,膜基结合强度高,膜层耐磨损寿命大幅度提高。

In this paper the advantages and recent research results of IBED technique in preparing MoS_2 Solid Lubricant film are introduced.Compared with traditional sputtering method,its advantages are as follows:the easy obtainment of basal orientation,the dense structurs of film,high bonding strength and the long wear-life.