基于Petrinet的半导体代工系统建模及案例研究

Petrinet-Based Modeling for Foundry Manufacturing System

提出了一种IDEF0与Petrinet相结合的建模方法,利用IDEF0静态模型对车间内的系统及各子系统之间的相互关系进行详细描述,利用Petri网的静态及动态特性描述了该系统中存在的回流、并发、资源共享、随机性的重做以及突发性设备故障等现象。以一个代工厂光刻系统为例,对该建模方法进行了具体介绍。

A combination modeling way of IDEF0 and Petri net was provided, the function of the whole system and the relationships between all sub-systems was described by IDEF0, PN was used for describing the dynamic behaviors like re-entrant, concurrence, resources sharing, re-work in stochastic, equipment break down, and so on. A lithography system is modeled in this way as an example.