摘要
应用物质自由焓函数法（函数法）及化学反应平衡常数Ｋｐ，对ＴｉＣｌ２，ＴｉＣｌ３和ＴｉＣｌ４的生成反应以及它们与Ｎ２和Ｈ２反应化学气相沉积ＴｉＮ的热力学进行了计算与分析。结果表明，用ＴｉＣｌ３与Ｎ２和Ｈ２的气相反应，能在较低温度下获得ＴｉＮ。
The thermodynamic calculation and analysis of the free energies of formation of titanium halides(TiCl 2,TiCl 3,TiCl 4)and CVD TiN coatings from titanium halides and N 2 and H 2 were performed with the functional method of free enthalpy of substance (φ function method)and the equilibrium constant of chemical reaction( K p )in the paper.The results show that the TiN coatings on the steel substrates can be obtained from gas reactions of TiCl 3 to N 2 and H 2 in a lower temperature.This provides theoretic basis for low temperature CVD TiN coatings.
基金
湖北省科学基金
关键词
热力学
金属
氮化钛
涂层
CVD
thermodynamics
φ function method
equilibrium constant K p
