摘要
为评价超薄类金刚石(DLC)膜在使用过程中的安全状况,利用原子力显微镜(AFM)的多模式功能,从磨损、表面改性、力电失效3个方面对DLC膜进行了试验研究.研究结果表明:相同法向力作用在不同厚度薄膜的磨损深度不同;对DLC膜的形貌和电学特性进行比较发现,磨损区域导电性比未磨损区域强;在厚度为64.09 nm薄膜施加正向25 V电场作用下,当针尖作用在表面的压力超过一定临界压力(375 nN)之后,薄膜发生击穿,形成凹坑.
In order to estimate the reliability of the ultra thin DLC films, wear, surface modification and mechatronic coupling based on multimode AFM were studied on the DLC films. Experimental results showed that wear depth under the same load was varied with different thick films by the contact AFM. It also indicated that conductivity of worn area was higher than unworn through topography and electrical characterization by EFM. Mechatronic coupling impact on DLC films by conductive AFM showed that films were broken down and heart-shaped pits formed at the 25 V substrate voltage while loads exceeded a certain critical value 375 nN.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2006年第5期466-469,共4页
Materials Science and Technology
基金
上海市科委纳米专项基金资助项目(0452nm041)
关键词
AFM
DLC
表面改性
力电耦合
atomic force microscope
diamond-like carbon
wear, surface modification
mechatronic coupling
